Thermal Clean Chamber for Clean Room Internal Equipment
Temperature fluctuation accuracy can be achieved from 0.1℃ to 0.002℃! We also accommodate requests for low humidity specifications of 5-40% RH.
The "Thermal Clean Chamber" is an internal device for clean rooms with a cleanliness level of ISO Class 4 (Class 10). It employs a PID control, ultra-precise components, and an airflow system tailored for temperature accuracy, with temperature fluctuation precision possible from 0.1℃ to 0.002℃. Additionally, humidity control is available not only in the standard specification range of 40-60% RH but also in response to requests for low humidity specifications of 5-40% RH. 【Features】 ■ Cleanliness level of ISO Class 4 (Class 10) ■ Temperature control possible within ±0.1℃ to ±0.005℃ ■ Customizable design to fit built-in devices ■ Safety considerations through multiple protection circuits *For more details, please refer to the PDF document or feel free to contact us.
- Company：日本エアーテック 本社
- Price：Other
